Abstract | A simple torch design for use with a microwave induced plasma (MIP) is described that can be internally cooled by synthetic or hydrocarbon based fluids. The MIP is generated within a liquid coolant-cooled concentric quartz discharge torch, energized within a novel microwave plasma cavity. Erosion of the discharge tube by the plasma, assessed by measurement of the emission intensity of ablated silicon, is essentially eliminated. The emission spectra of the liquid-cooled plasmas are compared to those sustained in uncooled discharge tubes. |
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