Preferred Orientation and Hardness Enhancement of TiN/CrN Superlattice Coatings Deposited by Reactive Magnetron Sputtering
Preferred Orientation and Hardness Enhancement of TiN/CrN Superlattice Coatings Deposited by Reactive Magnetron Sputtering
| Author | Search for: 1; Search for: 1; Search for: 1; Search for: 1 |
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| Affiliation |
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| Format | Text, Article |
| Subject | Superlattice coatings; Sputtering; Hardness; Preferred orientation |
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| In | |
| NRC number | SMPL-2001-0163 |
| NPARC number | 8928579 |
| Export citation | Export as RIS |
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| Record identifier | ac045855-ca1f-492e-bb93-ef7adad365b6 |
| Record created | 2009-04-23 |
| Record modified | 2020-04-16 |
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