| Abstract | Nanotechnology is dependent on nanofabrication techniques to structure matter at the 1–100 nm lengthscale. In this book, a variety of nanofabrication techniques are described, including those for lithography using electron and helium ion beams or nanoimprint lithography; for deposition using atomic layer deposition, surface monolayer formation, block copolymers, or electroepitaxy; and for etching using chemical mechanical polishing, ion beam induced reactions, laser nanopatterning, or anodic oxide templating. In each case, principles, methodology, equipment and process parameters are described, along with capabilities and example applications. Taken together, these represent a powerful toolbox of the rapidly evolving pool of nanofabrication techniques. |
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