Block Copolymer Templated Etching on Silicon
Block Copolymer Templated Etching on Silicon
| Format | Text, Article |
|---|---|
| Publication date | 2007 |
| In | |
| Peer reviewed | Yes |
| NRC number | 304 |
| NPARC number | 8926467 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | a7f1d324-5adf-40ef-97a9-8a6827e165d3 |
| Record created | 2009-04-23 |
| Record modified | 2020-05-10 |
- Date modified: