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Fourier Transform estimation of reflecting thin film thickness

From National Research Council Canada

AuthorSearch for: 1
Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
Series
  • Proceedings of SPIE, no. 5963 (2005): 596306-1–596306-7.
LanguageEnglish
Peer reviewedYes
NPARC number12346603
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Record identifiera5c17cb4-fbe4-4145-8073-b78cf1b1d6cf
Record created2009-09-17
Record modified2023-06-22
Date modified: