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Physics and Technology of High-k Gate Dielectrics 5

From National Research Council Canada

EditorSearch for: Iwai, H.; Search for: Kar, S.; Search for: De Gendt, S.; Search for: Houssa, M.; Search for: Landheer, Dolf1; Search for: Misra, D.
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Book Chapter
PublisherThe Electrochemical Society
PlacePennington, NJ
In
  • ECS Transactions 11, no. 4.
NPARC number12346786
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Record identifiera10c0451-ed7d-4b2d-953d-157d26c06c52
Record created2009-09-17
Record modified2020-03-03
Date modified: