Low voltage deformable mirror system driven by MEMS-based Lorentz actuator arrays

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DOIResolve DOI: https://doi.org/10.4224/40002661
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Name affiliation
  1. National Research Council of Canada. Nanotechnology
  2. National Research Council of Canada. Herzberg Astronomy and Astrophysics
FormatText, Address
ConferenceCOSMOL Day Microsystems 2021, April 22, 2021
Physical description22 slides
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PublisherNational Research Council of Canada
LanguageEnglish
Peer reviewedNo
NRC numberNRC-NANO-163
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Record identifier9e5da740-7a6a-4d12-899f-79d648f8a7b3
Record created2021-07-12
Record modified2021-07-12
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