Growth of SiO2 at the Sc2O3/Si100 interface during annealing

Alternative title	Silicon Nitride and Silicon Dioxide Thin Films VII
Author	Search for: Botton, G.; Search for: Romain, E.; Search for: Landheer, Dolf¹; Search for: Wu, X.; Search for: Wu, M-Y; Search for: Lee, M.; Search for: Lu, Z-H
Affiliation	National Research Council Canada. NRC Institute for Microstructural Sciences
Format	Text, Article
Conference	Spring ECS Meeting, March 23-April 1, 2003, Paris, France
NPARC number	12346215
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Record identifier	9dcca308-697d-453c-afdd-1f78b51a0bef
Record created	2009-09-17
Record modified	2020-04-16

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