Nanostructured metal oxide thin films for humidity sensors

DOI	Resolve DOI: https://doi.org/10.1109/JSEN.2008.920715
Author	Search for: Steele, J. J.; Search for: Taschuk, M. T.; Search for: Brett, M. J.¹
Affiliation	National Research Council Canada. National Institute for Nanotechnology
Format	Text, Article
Abstract	Capacitive humidity sensors were fabricated using countersunk interdigitated electrodes coated with amorphous nanostructured TiO2, SiO2, and Al2O3 thin films grown by glancing angle deposition. The capacitive response and response times for each sensor were measured. The sensor utilizing TiO2 exhibited the largest change in capacitance, increasing exponentially from ~ 1 nF to ~ 1muF for an increase in relative humidity from 2% to 92%. Adsorption and desorption response times were measured using flow rates of 2.5 l/min and were between 90 ms and 300 ms for the sensors studied here. A simple model of the capacitive response of the devices has been developed and used to calculate the dielectric constant of the combined system of our films and adsorbed water. The obtained dielectric constants are found to be much higher than bulk or literature values for similar systems.
Publication date	2008
In	IEEE Sensors Journal 8, no. 7-8 (2008): 1422–1429.
Language	English
Peer reviewed	Yes
NRC number	629 414
NPARC number	8926533
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Record identifier	9d6971b6-0c7a-4a9b-9ad2-2d54952724e1
Record created	2009-04-23
Record modified	2020-04-15