Tomographic measurement of buried interface roughness

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1017/S143192761501199X
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Affiliation
  1. National Research Council of Canada. Nanotechnology
FormatText, Article
ConferenceProceedings of Microscopy & Microanalysis 2015, Aug 2-6, 2018, Portland, Oregon
Abstract
Publication date
PublisherCambridge University Press
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LanguageEnglish
Peer reviewedYes
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Record identifier9a04e334-5df3-4af2-b2c5-17fff17006e2
Record created2020-01-21
Record modified2020-04-22
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