High-efficiency single etch step apodized surface grating coupler using subwavelength structure

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/lpor.201400113
AuthorSearch for: ; Search for: 1ORCID identifier: https://orcid.org/0000-0003-4232-9130; Search for: 1; Search for: 1; Search for: 1; Search for: 1; Search for: ; Search for: ; Search for: 2; Search for:
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
  2. National Research Council of Canada. Information and Communication Technologies
FormatText, Article
Subjectfinite difference time domain method; integrated optics; optical fiber fabrication; optical fibers; time domain analysis; buried oxide thickness; grating couplers; planar waveguide circuit; silicon-on-insulators (SOI); sub-wavelength structures; subwavelength grating; surface grating couplers; ultraviolet lithography; optical fiber coupling
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Peer reviewedYes
NPARC number21275556
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Record identifier885a37ba-79f2-4820-9727-e05f38d89e0e
Record created2015-07-14
Record modified2020-04-22
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