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Thin-film regular-array structures with 10-100 nm repeat distance

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1088/0957-4484/12/1/303
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FormatText, Article
Abstract
We show that regular arrays of pillars and helices, with repeat distance below 100 nm, can be grown by oblique deposition onto a patterned rotating substrate. The size limits for such structures are discussed.
Publication date
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  • Nanotechnology 12, no. 1: 11–13.
LanguageEnglish
Peer reviewedYes
NRC publication
This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

NPARC number12339185
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Record identifier8294acd6-985d-463c-ab6b-82ba18dd6197
Record created2009-09-11
Record modified2020-03-27
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