Cross-sectional resist profiles of dense nanoscale gratings and individual lines from electron beam lithography
Cross-sectional resist profiles of dense nanoscale gratings and individual lines from electron beam lithography
| Format | Text, Article |
|---|---|
| Peer reviewed | Yes |
| NRC number | 480 |
| NPARC number | 8926100 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 81042d9f-6925-4f66-a25d-4d2b5be67392 |
| Record created | 2009-04-23 |
| Record modified | 2020-04-16 |
- Date modified: