Methods to recognize the sample position for most precise interferometric length measurements
Methods to recognize the sample position for most precise interferometric length measurements
| DOI | Resolve DOI: https://doi.org/10.1117/12.555835 |
|---|---|
| Author | Search for: ; Search for: |
| Sponsor | Search for: SPIE |
| Format | Text, Article |
| Conference | Interferometry XII : applications : [proceedings of the] 12th Laser Interferometry Conference, August 4-5, 2004, Denver, Colorado, USA |
| ISSN | 0277-786X |
| ISBN | 0819454702 |
| Language | English |
| NRC number | NRC-INMS-746 |
| NPARC number | 8898705 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 80c410a8-9df4-47db-9c70-123f74435346 |
| Record created | 2009-04-22 |
| Record modified | 2020-04-16 |
- Date modified: