| DOI | Resolve DOI: https://doi.org/10.1117/12.2608824 |
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| Author | Search for: Ilie, Stefan T.; Search for: De Paoli, Greta; Search for: Flint, Alexander; Search for: Dominguez Bucio, Thalia; Search for: Ginel-Moreno, Pablo; Search for: Sagar, Jaya; Search for: Ortega-Monux, Alejandro; Search for: Lekkas, Konstantinos; Search for: Rutirawut, Teerapat; Search for: Mastronardi, Lorenzo; Search for: Skandalos, Ilias; Search for: Molina Fernández, Iñigo; Search for: Kanellos, George T.; Search for: Cheben, Pavel1; Search for: Smith, Peter G. R.; Search for: Gates, James; Search for: Gardes, Frederic Y. |
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| Editor | Search for: He, Sailing; Search for: Vivien, Laurent |
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| Affiliation | - National Research Council of Canada. Advanced Electronics and Photonics
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| Format | Text, Article |
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| Conference | Smart Photonic and Optoelectronic Integrated Circuits 2022, January 22 - February 28, 2022, San Francisco, United States |
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| Subject | antennas; waveguides; silicon; refractive index; ultraviolet radiation; optical design; chemical elements; deep ultraviolet; lithography; telecommunications |
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| Abstract | Silicon nitride (SiNx), has been widely regarded as a CMOS photonics enabling material, facilitating the development of low-cost CMOS compatible waveguides and related photonic components. We have previously developed an NH3-free SiN PECVD platform in which its optical properties can be tailored. Here, we report on a new type of surface-emitting nitrogen-rich silicon nitride waveguide with antenna lengths of L < 5 mm. This is achieved by using a technique called small spot direct ultraviolet writing, capable of creating periodic refractive index changes ranging from -0.01 to -0.04. With this arrangement, a weak antenna radiation strength can be achieved, resulting in far-field beam widths < 0.0150, while maintaining a minimum feature size equal to 300 nm, which is compatible with DUV scanner lithography. |
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| Publication date | 2022-03-05 |
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| Publisher | SPIE |
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| In | |
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| Series | |
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| Language | English |
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| Peer reviewed | Yes |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 7d4fc573-a94a-46c6-a6f2-99fe76c3fe34 |
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| Record created | 2024-02-06 |
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| Record modified | 2024-02-06 |
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