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Thin film calibration specimen for light-element EDX analysis

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FormatText, Poster
ConferenceMarch Meeting of the American Physical Society 1998, March 16-20 1998, Los Angeles, California
Abstract
Many transmission electron microscopes have been fitted with thin-window energy -dispersive X-ray (EDX) detectors capable of analysing light (4<Z<11) elements, but many of these systems are used only for qualitative or semi-quantitative measurements due to absence of accurate calibration factors. We have used reactive sputtering and e-beam evaporation to make free standing amorphous films which can be inserted into analytical TEM to routinely measure these k-factors. Elemental ratios in the films were measured by electron energy loss spectroscopy (EELS)
Publication date
PublisherAmerican Physical Society
In
  • Bulletin of the American Physical Society 43, no. 1.
LanguageEnglish
Peer reviewedNo
NRC publication
This is a non-NRC publication

"Non-NRC publications" are publications authored by NRC employees prior to their employment by NRC.

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Record identifier7c5cf194-1b87-49f7-b85d-1cb251042010
Record created2020-08-10
Record modified2020-08-10
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