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Ion-Beam Assisted Glancing Angle Deposition for Relative Humidity Sensors

From National Research Council Canada

FormatText, Article
In
  • IEEE Sensors Letters.
Peer reviewedYes
NRC number410
NPARC number8926609
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Record identifier7a72c6f4-ce61-490d-9e29-98c8a20cf95c
Record created2009-04-23
Record modified2020-04-16
Date modified: