Formation of chemically clean and morphologically smooth PtSi/Si interfaces

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  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
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Conference1993 MRS Fall Meeting, Symposium Ca: Interface Control of Electrical, Chemical, and Mechanical Properties, November 29 - December 3, 1993, Boston, Massachusetts, U.S.A.
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Peer reviewedYes
NPARC number21276804
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Record identifier7a06ff56-bb9e-44b7-a91d-2082550fee74
Record created2015-10-20
Record modified2020-04-24
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