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Integration of Advanced Micro- and Nanoelectronic Devices—Critical and Solutions

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Book Chapter
PublisherMaterials Research Society
PlaceWarrendale, Pennsylvania
In
  • Materials Research Society Symposium Proceedings 8111.
NPARC number12346587
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Record identifier6d4d149c-501f-4fb8-9b53-630fb6b51afe
Record created2009-09-17
Record modified2020-03-03

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