High-Q/V monolithic diamond microdisks fabricated with quasi-isotropic etching

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DOIResolve DOI: https://doi.org/10.1021/acs.nanolett.5b01346
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FormatText
TypeArticle
Journal titleNano Letters
ISSN1530-6984
1530-6992
Volume15
Issue8
Pages5131–5136
Subjectdiamond; microcavity; microdisk; nanofabrication; nanophotonics
Abstract
Optical microcavities enhance light–matter interactions and are essential for many experiments in solid state quantum optics, optomechanics, and nonlinear optics. Single crystal diamond microcavities are particularly sought after for applications involving diamond quantum emitters, such as nitrogen vacancy centers, and for experiments that benefit from diamond’s excellent optical and mechanical properties. Light–matter coupling rates in experiments involving microcavities typically scale with Q/V, where Q and V are the microcavity quality-factor and mode-volume, respectively. Here we demonstrate that microdisk whispering gallery mode cavities with high Q/V can be fabricated directly from bulk single crystal diamond. By using a quasi-isotropic oxygen plasma to etch along diamond crystal planes and undercut passivated diamond structures, we create monolithic diamond microdisks. Fiber taper based measurements show that these devices support TE- and TM-like optical modes with Q > 1.1 × 105 and V < 11(λ/n) 3 at a wavelength of 1.5 μm.
Publication date
PublisherAmerican Chemical Society
LanguageEnglish
Peer reviewedYes
NPARC number23001495
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Record created2017-02-20
Record modified2019-07-03
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