| Download | - View final version: Sealing SU-8 microfluidic channels using PDMS (PDF, 928 KiB)
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| DOI | Resolve DOI: https://doi.org/10.1063/1.3659016 |
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| Author | Search for: Zhang, Zhiyi1; Search for: Zhao, Ping1; Search for: Xiao, Gaozhi1; Search for: Watts, Benjamin R.; Search for: Xu, Changqing |
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| Affiliation | - National Research Council of Canada. NRC Institute for Microstructural Sciences
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| Format | Text, Article |
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| Abstract | A simple method of irreversibly sealing SU-8 microfluidic channels using PDMS is reported in this paper. The method is based on inducing a chemical reaction between PDMS and SU-8 by first generating amino groups on PDMS surface using N2 plasma treatment, then allowing the amino groups to react with the residual epoxy groups on SU-8 surface at an elevated temperature. The N2 plasma treatment of PDMS can be conducted using an ordinary plasma chamber and high purity N2, while the residual epoxy groups on SU-8 surface can be preserved by post-exposure baking SU-8 at a temperature no higher than 95 oC. The resultant chemical bonding between PDMS and SU-8 using the method create an interface that can withstand a stress that is greater than the bulk strength of PDMS. The bond is permanent and is long-term resistant to water. The method was applied in fabricating SU-8 microfluidi-photonic integrated devices, and the obtained devices were tested to show desirable performance. |
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| Publication date | 2011-11-09 |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 18914966 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 6487460f-52a5-4d16-9905-a121de83c7d8 |
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| Record created | 2011-11-23 |
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| Record modified | 2020-05-27 |
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