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In Situ Faraday-Modulated Fast-Nulling Single-Wavelength Ellipsometry of the Growth of Semiconductors, Dielectric and Metal Films

From National Research Council Canada

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EditorSearch for: Nalwa, H.
Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
  2. National Research Council Canada. NRC Institute for Chemical Process and Environmental Technology
  3. National Research Council Canada. NRC Genomics and Health Initiative
FormatText, Book Chapter
PublisherAcademic Press
In
  • Thin Films.
NPARC number12346256
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Record identifier5f4d609f-1b13-474c-bce7-70654befcc6d
Record created2009-09-17
Record modified2020-03-03
Date modified: