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Growth of vacuum evaporated ultra-porous silicon studied with spectroscopic ellipsometry and scanning electron microscopy

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1063/1.1823029
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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Journal of Applied Physics 97, no. 1, 013511 (2005).
LanguageEnglish
Peer reviewedYes
NPARC number12743952
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Record identifier5a9dd2ce-c4f3-4375-8b26-d10e7a01d892
Record created2009-10-27
Record modified2023-04-17
Date modified: