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Structural characterization of a UHV/CVD-grown SiGe HBT with graded base

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/S0040-6090(98)00468-4
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FormatText, Article
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  • Thin Solid Films 321, no. May 26 (26 May 1998): 167–171.
LanguageEnglish
NRC numberNRC-INMS-1116
NPARC number8898593
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Record identifier4f0d1782-7cd9-4b26-b3f7-78d590892779
Record created2009-04-22
Record modified2020-03-20
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