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Influence of Hydrogen on the Solid Phase Epitaxial Regrowth of Strained Layer Silicon Germanium Alloys

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
ConferenceStrained layer epitaxy : materials processing and device applications, San Francisco, California, USA, April 17-19, 1995
Publication date
In
  • Strained layer epitaxy : materials processing and device applications : symposium held April 17-19, 1995, San Francisco, California, U.S.A. (1995): 461–466.
Series
  • Materials Research Society symposia proceedings 379.
LanguageEnglish
NPARC number12339336
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Record identifier46b20147-c9e8-40c3-a1de-6fa8cdb86d61
Record created2009-09-11
Record modified2020-04-29
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