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Surface cleaning and preparation in AlGaN/GaN-based HEMT processing as assessed by X-ray photoelectron spectroscopy

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/j.apsusc.2007.01.016
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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
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In
  • Applied Surface Science 253, no. 14 (2007): 6185–6190–.
NPARC number12744268
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Record identifier4639c7b3-057d-4307-b85c-cb87bf463e10
Record created2009-10-27
Record modified2020-05-10
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