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Formation of thin semiconducting films by magnetron sputtering

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1016/B978-0-12-410755-7.50012-9
AuthorSearch for: 1
Affiliation
  1. National Research Council Canada
FormatText, Book Chapter
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In
  • Thin Films from Free Atoms and Particles (1985): 257–300.
LanguageEnglish
NPARC number12338220
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Record identifier425fac17-45be-4ec2-bcc6-4d9d12055467
Record created2009-09-10
Record modified2020-06-10
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