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The reoxidation of oxynitride films on silicon at 1050°C

From National Research Council Canada

AuthorSearch for: ; Search for: 1; Search for: 2
Affiliation
  1. National Research Council Canada. NRC Plant Biotechnology Institute
  2. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Publication date
In
  • Proc. 13th Int'l. Corrosion Congress (November 1996).
NPARC number12327245
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Record identifier39d1bc09-24cd-47de-982a-4f421de8c3aa
Record created2009-09-10
Record modified2020-03-20
Date modified: