Evaluation of electron tomography reconstruction methods for interface roughness measurement

DOI	Resolve DOI: https://doi.org/10.1002/jemt.23006
Author	Search for: Hayashida, Misa¹; Search for: Ogawa, Shinichi; Search for: Malac, Marek¹
Editor	Search for: Verkade, Paul
Name affiliation	National Research Council of Canada. Nanotechnology
Format	Text, Article
Journal title	Microscopy Research and Technique
ISSN	1059-910X 1097-0029
Subject	buried interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices
Abstract	We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement.
Publication date	2018-02-21
Publisher	Wiley
Language	English
Peer reviewed	Yes
NPARC number	23002836
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Record identifier	397db106-39cc-4754-9031-903da3bda758
Record created	2018-03-09
Record modified	2020-03-16