Evaluation of electron tomography reconstruction methods for interface roughness measurement

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/jemt.23006
AuthorSearch for: 1 ; Search for: ; Search for: 1 
EditorSearch for: Verkade, Paul
Name affiliation
  1. National Research Council Canada. Nanotechnology
FormatText
TypeArticle
Journal titleMicroscopy Research and Technique
ISSN1059-910X
1097-0029
Subjectburied interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices
Abstract
We evaluate the suitability of simultaneous iterative reconstruction technique (SIRT), filtered back projection, and simultaneous algebraic reconstruction technique methods for buried interface roughness measurements. We also investigate the effect of total electron dose distributed over the entire tilt series on measured roughness values. We investigate the applicability of the dose fractionation theorem by evaluating the effect of an increasing number of images, i.e., decreasing tilt increment size at fixed total electron irradiation dose on the quantitative measurement of buried interface roughness. The results indicate that SIRT is the most suitable method for reconstruction and a 3° to 5° angle is optimal for the roughness measurement.
Publication date
PublisherWiley
LanguageEnglish
Peer reviewedYes
NPARC number23002836
Export citationExport as RIS
Report a correctionReport a correction
Record identifier397db106-39cc-4754-9031-903da3bda758
Record created2018-03-09
Record modified2018-10-31
Date modified:
Report a problem on this page