Evaluation of electron tomography reconstruction methods for interface roughness measurement
Evaluation of electron tomography reconstruction methods for interface roughness measurement
DOI | Resolve DOI: https://doi.org/10.1002/jemt.23006 |
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Author | Search for: Hayashida, Misa1; Search for: Ogawa, Shinichi; Search for: Malac, Marek1 |
Editor | Search for: Verkade, Paul |
Name affiliation |
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Format | Text, Article |
Journal title | Microscopy Research and Technique |
ISSN | 1059-910X 1097-0029 |
Subject | buried interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices |
Abstract | |
Publication date | 2018-02-21 |
Publisher | Wiley |
Language | English |
Peer reviewed | Yes |
NPARC number | 23002836 |
Export citation | Export as RIS |
Report a correction | Report a correction | Record identifier | 397db106-39cc-4754-9031-903da3bda758 |
Record created | 2018-03-09 |
Record modified | 2020-03-16 |