Evaluation of electron tomography reconstruction methods for interface roughness measurement

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1002/jemt.23006
AuthorSearch for: 1 ; Search for: ; Search for: 1 
EditorSearch for: Verkade, Paul
Name affiliation
  1. National Research Council Canada. Nanotechnology
FormatText
TypeArticle
Journal titleMicroscopy Research and Technique
ISSN1059-910X
1097-0029
Subjectburied interface roughness; dose fractionation theorem; electron tomography; radiation damage; semiconductor devices
Abstract
Publication date
PublisherWiley
LanguageEnglish
Peer reviewedYes
NPARC number23002836
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Record identifier397db106-39cc-4754-9031-903da3bda758
Record created2018-03-09
Record modified2018-10-31
Date modified: