Data-driven prediction of fabrication variations in silicon photonic devices

From National Research Council Canada

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  1. National Research Council of Canada. Advanced Electronics and Photonics
  2. National Research Council of Canada. Digital Technologies
FormatText, Article
Conference2022 Photonics North (PN), May 24-26, 2022, Niagara Falls, ON, Canada
Subjectsilicon photonics; machine learning; deep learning; convolutional neural networks; fabrication process variations; fabrication; performance evaluation; degradation; scanning electron microscopy; electric potential; predictive models
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Record identifier366e51cb-c888-4f15-89f6-d08cd375ec64
Record created2023-01-24
Record modified2023-01-26
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