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Influence of laser parameters and material properties on micro drilling with femtosecond laser pulses

DOIResolve DOI: https://doi.org/10.1007/s003390051418
AuthorSearch for: 1; Search for: 2; Search for: 2; Search for: 2
Affiliation
  1. National Research Council Canada. NRC Institute for National Measurement Standards
  2. National Research Council Canada. Security and Disruptive Technologies
FormatText, Article
Abstract
We report experimental results of drilling micro holes in Al, Mo, Ti, Cu, Ag, Au, and brass thin metal foils in air using 60-femtosecond Ti:sapphire laser pulses. The influence of laser parameters and material properties on drilling processes at the sub-10-micron scale has been examined. Comparison of hole drilling using 60-fs pulses with that using 50-ps and 10-ns pulses at an energy fluence of ∼ 15 J/cm2 indicates that a significant amount of melting is present in both ps and ns regimes, whereas with fs pulses, fewer and much smaller droplets from the molten phase are observed.
Publication date
In
  • Applied Physics A: Materials Science and Processing 69, no. 7 (29 December 1999): S367–S371.
LanguageEnglish
Peer reviewedYes
NPARC number21276235
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Record identifier32501c02-ff0c-41c9-b72d-759167126991
Record created2015-09-28
Record modified2020-03-20

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