Nanoscale resist morphologies of dense gratings using electron-beam lithography
Nanoscale resist morphologies of dense gratings using electron-beam lithography
| Format | Text, Article |
|---|---|
| Publication date | 2007 |
| In | |
| Peer reviewed | Yes |
| NRC number | 301 |
| NPARC number | 8926129 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 3076ff26-b020-454c-bc58-f6807e3233a1 |
| Record created | 2009-04-23 |
| Record modified | 2020-05-10 |
- Date modified: