The effect of microstructure on the interrelationship of electrical, optical and opto-electronic properties in amorphous SixHy alloy films prepared by planar R.F. Magnetron Sputtering
The effect of microstructure on the interrelationship of electrical, optical and opto-electronic properties in amorphous SixHy alloy films prepared by planar R.F. Magnetron Sputtering
| DOI | Resolve DOI: https://doi.org/10.1016/0022-3093(85)90787-2 |
|---|---|
| Author | Search for: ; Search for: ; Search for: |
| Format | Text, Article |
| Publication date | 1985 |
| In | |
| Language | English |
| NRC number | NRCC 24702 NRC-INMS-3496 |
| NPARC number | 8897489 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 2cb74e31-9a36-48e5-832a-eacbc4dd6479 |
| Record created | 2009-04-22 |
| Record modified | 2020-03-17 |
- Date modified: