| DOI | Resolve DOI: https://doi.org/10.1109/JLT.2009.2021562 |
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| Author | Search for: Kuan, Pei Yap; Search for: Delage, A.; Search for: Lapointe, J.1; Search for: Lamontagne, B.1; Search for: Schmid, J. H.1; Search for: Waldron, P.1; Search for: Syrett, B. A.; Search for: Janz, S.1 |
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| Affiliation | - National Research Council of Canada. Advanced Electronics and Photonics
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| Format | Text, Article |
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| Abstract | We use star couplers to measure the relative scattering losses of silicon-on-insulator (SOI) ridge waveguides of various widths over the range of 1.75 to 0.2 mum in a single measurement. The scattering loss data obtained for waveguides fabricated by different photolithography and e-beam base processes correlate well with the measured root-mean-square roughness of the waveguide sidewalls obtained using SEM image analysis, and are in qualitative agreement with the prediction of simple scattering loss theory. |
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| Publication date | 2009-04-28 |
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| Publisher | Institute of Electrical and Electronics Engineers |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NPARC number | 23004664 |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 272e7d4f-f600-4cc4-ad76-84322ebb5778 |
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| Record created | 2018-12-06 |
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| Record modified | 2021-09-17 |
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