Robust single-etch surface grating couplers for silicon nitride waveguide platform

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2666064
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Affiliation
  1. National Research Council of Canada. Quantum and Nanotechnologies
FormatText, Article
ConferenceIntegrated Optics: Design, Devices, Systems, and Applications VII, April 24-28, 2023, Prague, Czech Republic
Subjectoptical gratings; silicon nitride; optical design; waveguides; fabrication; optical fibers; finite-difference time-domain method; apodization; polarization gratings; silicon
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LanguageEnglish
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