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Reactively sputtered silicon-oxynitride films and filters

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference49th Annual Technical Conference, Society of Vacuum Coaters, 22-27 April 2006, Washington, D.C., USA
Publication date
In
  • SVC, Society of Vacuum Coaters : 49th annual technical conference proceedings (2006): 725–727.
LanguageEnglish
NPARC number12346737
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Record identifier142e7306-2231-4593-ad6d-8d7c15b8ab07
Record created2009-09-17
Record modified2020-04-22
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