Chemically amplified polysilanes: synthesis and applications as EUV resists
Chemically amplified polysilanes: synthesis and applications as EUV resists
| Alternative title | Chem. Mater. |
|---|---|
| Format | Text, Other |
| NRC number | 80 |
| NPARC number | 8926260 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 13ff2fb0-3661-4289-b1a2-755373e00b9c |
| Record created | 2009-04-23 |
| Record modified | 2020-03-03 |
- Date modified: