Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
Fabrication of nanoelectromechanical resonators using a cryogenic etching technique
| Alternative title | Journal of Vacuum Science & Technology B |
|---|---|
| Format | Text, Other |
| Publication date | 2006 |
| NRC number | 477 |
| NPARC number | 8926540 |
| Export citation | Export as RIS |
| Report a correction | Report a correction (opens in a new tab) |
| Record identifier | 11fc1ca8-5e03-4e96-8445-c620110ec81b |
| Record created | 2009-04-23 |
| Record modified | 2020-03-03 |
- Date modified: