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Meso-structure study of a porous SiO2 thin film on 001 Si by TEM

From National Research Council Canada

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Affiliation
  1. National Research Council Canada. NRC Steacie Institute for Molecular Sciences
FormatText, Article
ConferenceMicroscopy and Microanalysis 2003, Aug 2003, San Antonio, Texas
NPARC number12346735
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Record identifier0be5f205-8381-455d-bdc4-f13680882704
Record created2009-09-17
Record modified2020-04-16
Date modified: