Method and apparatus for layer thickness measurement

From National Research Council Canada

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TypeTechnical Report
Series titleUnited States Patent Application
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IdentifierIR-2006-18
NRC number6361
NPARC number8895003
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Record identifier0b62a739-764a-4e4b-9efd-cd5161e1a9fe
Record created2009-04-22
Record modified2019-02-13
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