| DOI | Resolve DOI: https://doi.org/10.1007/BF02402668 |
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| Author | Search for: Allaire, F.; Search for: Dallaire, S.1 |
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| Affiliation | - National Research Council Canada
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| Format | Text, Article |
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| Subject | nitride; production rate; infrared spectrum; internal pressure; NH₄Cl |
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| Abstract | Ultra-fine silicon nitride powder was synthesized from the SiCl₄-NH₃-H₂-Ar system using a d.c. plasma torch reactor (production rate 150–400 g h⁻¹). The powder produced is pure white, fluffy and amorphous. The particles are spheroidal in shape with a mean diameter between 30–60 nm forming aggregates of 0.1–0.4 μm depending on the operational conditions. Chemical analysis on the crude powder handled at ambient atmosphere revealed: N(−NH₄Cl):37–39%, O:3–5% and Cl:2–3%. The amorphous powder can be crystallized around 1500 °C under nitrogen to give an α-phase content in excess of 90%. Infrared spectra can be used to semi-quantitatively determine the NH₄Cl content of the crude powder. That proportion is between 2.5 and 4%. The influence of some process parameters e.g. (N/Si and H₂/N molar ratios, internal pressure) on powder properties was also investigated. The N/Si molar ratio was found to be the most important parameter for the powder composition whereas the internal pressure plays a major role on the powder morphology. |
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| Publication date | 1991-12-01 |
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| Publisher | Springer |
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| In | |
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| Language | English |
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| Peer reviewed | Yes |
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| NRC number | CNRC 31684
NRC-IGM90AP-21008-1007-G |
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| Export citation | Export as RIS |
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| Report a correction | Report a correction (opens in a new tab) |
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| Record identifier | 090ab10a-52d4-477a-acd4-25320aa7e5dc |
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| Record created | 2020-08-05 |
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| Record modified | 2020-08-05 |
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