White Paper: AI-enabled integrated nanophotonics at the NRC: design, fabrication, and optical metrology

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DOI	Resolve DOI: https://doi.org/10.4224/40004092
Author	Search for: Xu, Dan-Xia¹ORCID identifier: https://orcid.org/0000-0002-0490-5224; Search for: Grinberg, Yuri²ORCID identifier: https://orcid.org/0000-0003-3349-1590
Affiliation	National Research Council Canada. Quantum and Nanotechnologies National Research Council Canada. Digital Technologies
Format	Text, Technical Report
ISBN	978-0-662-22986-5
Physical description	16 p.
Date published	2026-05-20
Publisher	National Research Council Canada
Language	English
Peer reviewed	No
Identifier	NRC-QN-AEP-113 NRC-DT-1288
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Record identifier	07ec3a8e-86bd-4c1a-8af2-6360aef316e4
Record created	2026-08-20
Record modified	2026-08-20

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