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The use of etching during the precise manufacture of optical multilayer coatings

From National Research Council Canada

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Affiliation
  1. National Research Council of Canada. NRC Institute for Microstructural Sciences
FormatText, Article
Conference45th Annual Technical Conference of the Society of Vacuum Coaters, April 13-18, 2002, Lake Buena Vista, Florida
Publication date
In
  • SVC, Society of Vacuum Coaters : 45th Annual Technical Conference proceedings (2002): 262–265.
LanguageEnglish
NPARC number12346729
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Record identifier04dab4ee-6e2d-4f02-a034-b8173534497c
Record created2009-09-17
Record modified2020-03-30
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