Optomechanical cavities in silicon-on-insulator

From National Research Council Canada

DOIResolve DOI: https://doi.org/10.1117/12.2647263
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EditorSearch for: García-Blanco, Sonia M.; Search for: Cheben, Pavel
Affiliation
  1. National Research Council Canada. Quantum and Nanotechnologies
FormatText, Article
ConferenceIntegrated Optics: Devices, Materials, and Technologies XXVII, January 28 - February 3, 2023, San Francisco, United States
Subjectsilicon; phonons; waveguides; acoustics; silica; antennas; microresonators; show all keywords
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LanguageEnglish
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Record identifier0124087b-e2de-4e18-b9db-37c757b2c023
Record created2024-10-21
Record modified2024-10-21
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